Section NUCLEAR REACTORS, BOILERS, MACHINERY AND MECHANICAL APPLIANCES; PARTS THEREOF (84)
Chapter --Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note?9(C) to this chapter; (8486)
Result ----- Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits (84862000)